The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
GEC ICP Reactor, Argon Chemistry
The GEC cell was introduced by NIST in order to provide a standardized platform for experimental and modeling studies of discharges in different laboratories. The plasma is sustained via inductive heating. The Reference Cell operates as an inductively-coupled plasma in this model. This ... Read More
3D ICP Reactor, Argon Chemistry
3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at low pressure (20 mtorr). The gas flows into the ... Read More
Electrostatic Precipitator
This model computes the fluid flow, charge transport and electric potential in an electrostatic precipitator. Based on the resulting fields, particles of different diameter are fed into the device and the transmission probability is computed. As expected, the separation efficiency shows ... Read More
In-Plane Microwave Plasma
Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into reactor and an Argon plasma is created. The wave is ... Read More
Thermal Plasma
This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards the same limit. Read More
Positive and Negative Corona Discharges
This tutorial presents a study of positive and negative corona discharges in dry air at atmospheric pressure. The discharges are sustained within two electrodes in a coaxial configuration by a high voltage DC source applied to the inner electrode. Two different types of models are used: ... Read More
Microwave Cavity Plasma Reactor
This tutorial model solves for a hydrogen plasma created in a microwave cavity. The model computes the fluid flow and gas heating self-consistently. Read More
Model of an Argon/Chlorine Inductively Coupled Plasma Reactor with RF Bias
This tutorial model solves for an inductively coupled plasma reactor with RF bias (also known as ICP/CCP reactors) in a mixture of argon/chlorine. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
Surface Chemistry Tutorial Using the Plasma Module
Surface chemistry is often an overlooked aspect of reacting flow modeling. This tutorial model shows how surface reactions and species can be added to study processes like chemical vapor deposition (CVD). The tutorial then models silicon growth on a wafer. Initially, the example uses a ... Read More
Model of an Argon/Oxygen Inductively Coupled Plasma Reactor
This tutorial model solves for an inductively coupled plasma reactor in a mixture of argon/oxygen. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. Read More