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3 Plate MEMS Capacitive touch sensor
Posted Jun 12, 2021, 8:54 a.m. EDT Electromagnetics, MEMS & Nanotechnology, Structural Mechanics Version 5.4 0 Replies
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Hello All, I'm new here and I was going through the blog on how to design and simulate the MEMS capacitive pressure sensor that is available in the following link. https://www.comsol.com/model/capacitive-pressure-sensor-476
It was nice and run well.
I was thinking of designing a 3 plate mems capacitor where I can put 2 dielectric material and simulate the same.
I'm unable to do so. Please help me. I'm attaching the geometry sequence model and also the simulation file.
Attachments:
Hello Prasanna Kumar Routray
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