A Galeria de Aplicações possui tutorias sobre o COMSOL Multiphysics® e aplicativos de demonstração pertinentes às áreas de elétrica, mecânica estrutural, acústica, escoamento e química. Você pode usar esses exemplos como um ponto de partida para o seu próprio trabalho de simulação baixando o modelo do tutorial ou o aplicativo e suas instruções. Use a função "Busca Rápida" para encontrar modelos da sua área de interesse. Para baixar os arquivos MPH, faça o login, ou se cadastre, no COMSOL Access usando uma licença válida do COMSOL, para poder baixar os arquivos MPH. Note que muitos dos exemplos disponibilizados aqui também podem ser acessados através da Application Libraries que faz parte do software COMSOL Multiphysics® e está disponível a partir do menu File.


Argon Boltzmann Analysis

The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects of various parameters on the electron energy distribution function and rate coefficients for an argon discharge.

Oxygen Boltzmann Analysis

The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model solves a two-term approximation to the Boltzmann equation and compares the computed drift velocity and ...

Electrodeless Lamp

This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV emission from the plasma at 185 nm and 253 nm. The UV emission can stimulate phosphors coated on the surface of the bulb. From an electrical point of view, the lamp ...

Impedance Matching

This tutorial drives a capacitively coupled plasma with an L-type matching network at high and low powers. At low power, where the harmonics in the current are low, prefect matching is obtained at the chosen power value. Sweeps over power, frequency, and pressure are performed and their effect on the match power transfer ratio and efficiency are examined. Finally, a sweep is performed over a ...

Computing the Plasma Impedance

This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The _Time Periodic_ study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is called. This allows the plasma impedance to be computed for a given set of input parameters. This impedance ...

CCP Ion Energy Distribution Function

This model computes the ion energy distribution function (IEDF) for a commercial capacitively coupled plasma reactor. The results show good agreement with experimental data.

Chlorine Discharge Global Model

Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction of the time it would take for space-dependent models. This makes them a good choice to study large reaction ...

GEC CCP Reactor, Argon Chemistry, 1D

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma

Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at frequencies higher than twice the driving frequency. For dual frequency CCP reactors the harmonic content of the ...

Alpha to Gamma Transition

Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the discharge is sustained primarily by electron avalanche within the sheaths initiated by secondary electrons ...

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