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Anisotropic Damping in MEMS Oscillator
Published in 2016
The analyzed MEMS oscillator is composed by a spring (beam) supported mass that needs to vibrate with a high Q-factor in the horizontal plane. Nevertheless, the transverse motion needs to be highly damped (low Q-factor). The purpose of the work was to explore different system configurations to determine the most suitable one for the scope of the device. Different parameters were varied to sweep multiple scenarios, namely thin-film gap thickness, ambient pressure and surface texture.
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- stefano_presentation.pdf - 1.5MB
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- stefano_abstract.pdf - 0.18MB