Surface Acoustic Wave Based MEMS Resonator

S. Dixit[1], R. C. Jain[1]
[1]Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Published in 2014

Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface.

A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz.

Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The frequency of SAW resonator can be given by the formula given below:

                                                       F = V/λ

Where, F is the resonant frequency, v is the acoustic wave velocity and λ is the acoustic wavelength SAW technology relies on the use of piezoelectric substrates in which acoustic field gives rise to electric fields, and vice versa.