VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics
This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape that results in reasonable output stimuli with minimal deflection and stress. Three different shapes of diaphragms are considered in this study are circular, square and rectangular. Not only form the VLSI layout aspect, but also from the pressure, stress and sensor output considerations, square shaped diaphragms are preferred.