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Design and Simulation of a Cantilever Array for Fluid Flow Sensing Applications

K. Kavitha[1], Y. R. Manjoosha[1], C. S. Sukanya[1], K. Saranya[1], K. Chandra Devi[1], M. Alagappan[1], A. Gupta[1]
[1]Department of Biomedical Engineering, PSG college of technology, Coimbatore, TamilNadu, India

The biological hair-cell is a modular building block of a rich variety of biological sensors. These sensors are responsive to various mechanical properties like vibration, touch, gravitational forces, etc., especially flow. Using micro and nano-fabrication technology, an engineering equivalent of such sensors have been reported to be fabricated, imitating the structure and transfer function of ...

Resonant Frequency Analysis of Quartz Shear Oscillator

T. Satyanarayana[1], V. Sai Pavan Rajesh[2]
[1]NPMASS Centre, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India
[2]Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India

The most commonly used type of resonator is the AT-cut, where the quartz blank is in the form of a thin plate cut at an angle to the optic axis of the crystal. This paper reports the modeling of a quartz oscillator for a resonant frequency analysis based on piezoelectric effects. The proposed oscillator consists of a single quartz disc with two electrodes on the top and bottom surfaces of the ...

A Consistent Environment for the Numerical Prediction of the Properties of Composite Materials

J. Schumacher[1], P. Fideu[2], G. Ziegmann[1], and A. Herrmann[3]
[1]TU Clausthal-Institute of Polymere Materials and Plastic Engineering, Clausthal-Zellerfeld, Germany
[2]CTC GmbH Stade, Stade, Germany
[3]Faserinstitut Bremen e.V., Bremen, Germany

The current paper focuses on the creation of a consistent environment for the numerical prediction of the physical properties of polymer composite. A limitation factor for the successful simulation of composite processes is the correct estimation of the effective properties depending on several factors such as the constituents (fiber, polymer), the process setup. The numerical prediction of the ...

Modeling and Characterization of Superconducting MEMS for Microwave Applications in Radioastronomy

N. Al Cheikh[1], P. Xavier[1], J. Duchamp[1], and K. Schuster[2]
[1]Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
[2]Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France

Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the ...

Robust and Reliability-based Design Optimization of Electromagnetic Actuators Using Heterogeneous Modeling with COMSOL Multiphysics and Dynamic Network Models

H. Neubert[1], A. Kamusella[1], and T-Q. Pham[2]
[1]Technische Universität Dresden, Germany
[2]OptiY e. K. Aschaffenburg, Germany

For an exemplary electromagnetic actuator used to drive a Braille printer, a design optimization was performed. The optimization involves stochastic variables and comprises nominal optimization, robustness analysis and robust design optimization. A heterogeneous model simulates the static and the dynamic behavior of the actuator and its non-linear load. It consists of a network model in ...

Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements

S. Cerimovic[1], R. Beigelbeck[2], H. Antlinger[3], J. Schalko[2], B. Jakoby[3], and F. Keplinger[1]
[1]Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
[2]Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
[3]Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria

A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...

Investigation on MEMS Based Thermal Sensor for Cancer Detection

A. V. Lakshmi[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

This paper presents the design and simulation of a thermal sensor using COMSOL Multiphysics® software for the detection of low body temperature syndrome which can allow the early detection of cancer. This sensor is made of an alloy consisting of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the structural change in the sensor ...

Finite Element Analysis of Contact Studies of Radio Frequency MEMs Switch Membranes

J. Liu [1], V. B. Chalivendra [1], C. Goldsmith [1], W. Huang [1]
[1] University of Massachusetts - Dartmouth, Dartmouth, MA, USA

Radio frequency (RF) micro-electro mechanical system (MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact. Membrane contact surfaces have complex surface roughness patterns and the mechanical contact problem is very challenging to understand. The capability to predict contact quality becomes extremely important to ...

High Coupling Factor Piezoelectric Materials for Bending Actuators: Analytical and Finite Elements Modeling Results

I.A. Ivan[1], M. Rakotondrabe[1], and N. Chaillet[1]
[1]FEMTO-ST Institute, University of Franche-Comte, Besançon, France

New giant piezoelectric factor materials such as PMN-PT and PZN-PT were researched during the last decade and are actually becoming commercially available. As they seem very attractive for actuator designs, we studied their potential in replacing PZT ceramics. In a first comparative approach, we tested a series of classic rectangular composite bimorph structures of different combinations of ...

Kinetic Investigation of a Mechanism for Generating Microstructures on Polycrystalline Substrates Using an Electroplating Process

T. Soares[1], H. Mozaffari[2], H. Reinecke[1]
[1]Universität Freiburg, Freiburg im Breisgau, BW, Germany
[2]Hochschule Furtwangen, Tuttlingen, BW, Germany

The purpose of this study is to understand the growth mechanism of copper (Cu) films on a Cu-Zn system substrate with a pre-defined pattern. The pattern was defined by conducting a selective etching process on a two-phase polycrystalline substrate. As a result of this process, there were etched regions correspondent to beta-phase crystals and quasi non-etched regions that belong to alpha-phase ...