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Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...

A Dynamic Electrowetting Simulation using the Level-Set Method

B. Cahill[1], A. Giannitsis[1], G. Gastrock[1], M. Min[1,2], and D. Beckmann[1]
[1]Institut für Bioprozess- und Analysenmesstechnik e.V., Heiligenstadt, Germany
[2] Department of Electronics, Tallinn University of Technology, Tallinn, Estonia

Electrowetting occurs with the electrical control of the surface wetting properties through the application of an electric potential. A simulation of electrowetting driven droplet dynamics is performed using the COMSOL Multiphysics level-set method for a sessile droplet and for a droplet in a microchannel. The response of the drop to a step voltage is studied. The contact angle at one edge of ...

Piezoelectric Vibration Energy Harvester Based on Thickness-Tapered Cantilever

S. Kundu [1], H. B. Nemade [1],
[1] Indian Institute of Technology Guwahati, Guwahati, Assam, India

The paper presents simulations of uniform thickness and thickness-tapered types of piezoelectric vibration energy harvesters using COMSOL Multiphysics software. The simulated vibration energy harvesters have bimorph cantilever structure with end mass. Tapering the thickness of the piezoelectric layer in bimorph towards the free end is found to improve the stress distribution in the beam and ...

Parametric Simulation of PZT Diameter to Hole Ratio for Optimized Membrane Displacement

A. Arevalo [1], D. Castro [1], D. Conchouso [1], I. G. Foulds [2]
[1] Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Saudi Arabia
[2] The University of British Columbia, School of Engineering, Okanagan Campus, Saudi Arabia

For our simulation we used the Piezoelectric Devices interface. The structure was set with (clamped) fix constraint boundaries to both ends. The bottom electrode was set to be the ground for the electrostatic physics and the top electrode was set to be a Terminal with potential of 10V. A parametric sweep study was set to change the geometry, the parameters to change was the hole diameter (Holed) ...

Simulation of a Buckled Cantilever Plate with Thermal Bimorph Actuators

A. Arevalo [1], D. Conchouso [1], D. Castro [1], M. Diaz [2], I. G. Foulds [3],
[1] CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[3] University of British Columbia, Vancouver, BC, Canada

INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the ...

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov [1], U. Mescheder [1],
[1] Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...

CMUT Based Free Membrane Intra-Cardiac Volumetric Blood Flow-Meter

P. Priya [1], B. D. Pant [2],
[1] Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
[2] CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After ...

MEMS Based Sensor for Blood Group Investigation

M. Kaushik [1], S. Katti [1], V. Saradesai [1], P. Naragund [1], P. Vidhyashree [1], A. K. V. Nandi [1]
[1] B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India

This article describes the design of MEMS based cantilever structure intended for determination of blood group and it is compared with manual method. Cantilever structure design has a sensing layer and when a blood sample comes in contact with this, results in coagulation. The surface tension in turn occurs due to chemical and biological reactions of antigen and antibodies resulting in ...

Design and Simulation of High-Throughput Microfluidic Droplet Dispenser for Lab-on-a-Chip Applications - new

C. Jin[1], X. Xiong[2], P. Patra[1], R. Zhu[1], J. Hu[3]
[1]Department of Biomedical Engineering, University of Bridgeport, Bridgeport, CT, USA
[2]Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
[3]Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA

Digital Microfluidic Biochip (DMFB) has been widely used in Lab-on-a-Chip (LoC) for disease diagnosis and treatment applications. To quickly convert traditional analog fluidic sample into digital droplets for DMFB processing, a high-throughput microfluidic droplet dispenser device is needed. In this paper, a high-throughput analog-to-digital microdroplet dispenser for Lab-on-a-Chip application ...