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Blog Posts Tagged MEMS Module

Modeling a Stacked Piezoelectric Actuator in a Valve

May 13, 2015

Piezoelectric valves are opened and closed by stacked piezoelectric actuators that are positioned above a seal. By applying a voltage to the stacked piezoelectric actuator, it can be made to expand or contract and the resulting deformation is used to open and close the valve. In this blog post, we feature a tutorial model of a stacked piezoelectric actuator in a pneumatic valve, new with COMSOL Multiphysics version 5.1.

Improving the Power of Optical Systems via Component Design

January 21, 2015

If you look up at the night sky, especially somewhere far away from city lights, you will see the stars twinkle. While an inspiration for poets and romantics throughout time, the beauty of the starry night sky has also been a challenge to astronomers studying the night sky and the universe. It has led to the development of adaptive optics, which is used nowadays to improve the power of optical systems beyond the obstacles imposed by the optical medium.

New Piezoelectric Modeling Interface in COMSOL 5.0

December 30, 2014

We have introduced a new interface for simulating piezoelectric devices in version 5.0 of the COMSOL Multiphysics simulation software. This interface aims to achieve several things. In this blog post, I will explain what these things are and how you can use them.

Modeling a Surface Micromachined Accelerometer

December 23, 2014

Surface micromachining is a process used to manufacture MEMS devices, which includes accelerometers. In this blog post, we model the electric field and forces within an accelerometer as well as highlight a new geometry feature available in COMSOL Multiphysics version 5.0.

Video Tutorial: Capacitive Pressure Sensor

June 16, 2014

If you are searching for a tutorial on how to model a miniaturized 3D electromechanics problem, then look no further. We have just published an updated version of our video tutorial on how to simulate a capacitive pressure sensor. COMSOL Multiphysics version 4.4 and the MEMS Module are used to simulate the electrostatic, structural, and thermal physics that occur.

Simulating an RF MEMS Switch

January 7, 2014

An RF MEMS switch is an electromechanical component found in RF systems. It usually consists of a micromechanical bridge or cantilever, a substrate, and an electrode or dielectric layer. These devices can switch at RF frequencies and tend to have high isolation, i.e. power loss when the switch turns off; low insertion loss (loss of signal power when the switch is on), and extremely low (almost zero!) power consumption. Let’s take a look at how you can use COMSOL Multiphysics […]

MEMS Microphone Model Presented at ASA 166 in San Francisco

January 2, 2014

I recently had the pleasure of preparing a small contribution to the 166th Meeting of the Acoustical Society of America (Fall 2013) together with Wade Conklin and Jordan Schultz from Knowles Electronics. Wade presented our paper entitled “Characterization of a microelectromechanical microphone using the finite element method”. The work consisted of implementing a virtual prototype of a Knowles MEMS microphone (the SPU0409LE5H microphone, see picture below) using COMSOL Multiphysics.

Intro to Piezoelectric BAW Resonator Modeling

September 25, 2013

If you are using a cell phone, GPS, Bluetooth, or WiFi, chances are that they all have BAW resonators working inside them. All wireless electronic equipment use RF filters to help narrow down the frequency range they should operate within. With thousands of devices working within closely-packed radio frequencies, it is becoming increasingly important to design filters that would be able to reduce interference from unwanted frequencies, boost the signal-to-noise ratio, and lower insertion loss. Doing so may lead to […]


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