Adsorption and Desorption of Water in a Load Lock Vacuum System
Application ID: 14303
This model shows how to simulate the time-dependent adsorption and desorption of water in a vacuum system at low pressures. The water is introduced into the system when a gate valve to a load lock is opened and the subsequent migration and pumping of the water is modeled.
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however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
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